pchang718
48 lines
2.2 KiB
Python
48 lines
2.2 KiB
Python
# physics/pcad_physics.py
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# Process simulation database for Ion Implantation and Thermal Diffusion in Silicon
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import numpy as np
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# Implant Range & Straggle in Silicon (Energy in keV, Rp and dRp in microns)
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IMPLANT_DB = {
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'Boron': {
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'energy': np.array([10.0, 20.0, 30.0, 50.0, 80.0, 100.0, 150.0, 200.0, 300.0, 400.0, 500.0, 800.0, 1000.0, 1500.0, 2000.0]),
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'Rp': np.array([0.04, 0.07, 0.10, 0.16, 0.24, 0.30, 0.42, 0.55, 0.75, 0.95, 1.15, 1.65, 1.95, 2.70, 3.20]),
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'dRp': np.array([0.015, 0.025, 0.035, 0.050, 0.063, 0.070, 0.085, 0.100, 0.115, 0.125, 0.135, 0.155, 0.165, 0.185, 0.200])
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},
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'Phosphorus': {
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'energy': np.array([10.0, 20.0, 30.0, 50.0, 80.0, 100.0, 150.0, 200.0, 300.0, 400.0, 500.0, 1000.0, 2000.0]),
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'Rp': np.array([0.015, 0.028, 0.040, 0.065, 0.100, 0.120, 0.180, 0.240, 0.360, 0.480, 0.600, 1.100, 1.900]),
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'dRp': np.array([0.007, 0.012, 0.016, 0.025, 0.038, 0.045, 0.060, 0.075, 0.095, 0.110, 0.120, 0.150, 0.180])
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},
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'Arsenic': {
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'energy': np.array([10.0, 20.0, 30.0, 50.0, 80.0, 100.0, 150.0, 200.0, 300.0, 400.0, 500.0, 1000.0]),
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'Rp': np.array([0.010, 0.018, 0.025, 0.038, 0.058, 0.070, 0.100, 0.130, 0.190, 0.250, 0.310, 0.580]),
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'dRp': np.array([0.004, 0.007, 0.009, 0.014, 0.020, 0.025, 0.035, 0.045, 0.060, 0.075, 0.088, 0.135])
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}
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}
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# Diffusion Arrhenius parameters in Silicon (D0 in cm^2/s, Ea in eV)
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DIFFUSION_DB = {
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'Boron': {'D0': 1.0, 'Ea': 3.46},
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'Phosphorus': {'D0': 10.5, 'Ea': 3.69},
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'Arsenic': {'D0': 0.32, 'Ea': 3.56}
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}
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def get_implant_params(dopant, energy_kev):
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"""Interpolate Rp and dRp from database for a given energy in keV. Returns values in cm."""
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db = IMPLANT_DB.get(dopant, IMPLANT_DB['Boron'])
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e = np.clip(energy_kev, db['energy'][0], db['energy'][-1])
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Rp_um = np.interp(e, db['energy'], db['Rp'])
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dRp_um = np.interp(e, db['energy'], db['dRp'])
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return Rp_um * 1e-4, dRp_um * 1e-4
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def get_diffusion_coefficient(dopant, temp_c):
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"""Calculate the diffusion coefficient D in cm^2/s at temperature temp_c in Celsius."""
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db = DIFFUSION_DB.get(dopant, DIFFUSION_DB['Boron'])
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T_k = temp_c + 273.15
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k_B = 8.617333262145e-5 # eV/K
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D0 = db['D0']
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Ea = db['Ea']
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return D0 * np.exp(-Ea / (k_B * T_k))
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